Investigation of cylindrical and conical electrostatic wobble micromotors

Abstract

This paper describes the analysis, design, construction and testing of two electrostatic wobble micromotors: a conventional cylindrical design and a new conical design. Both designs have stators with eight segments. The cylindrical micromotor rotor is about 4 mm in diameter and 20 mm long while the conical rotor has a maximum diameter of about 10 mm and is 12 mm long. The advantage of the new conical design is that it eliminates the need for a long pivot bearing and hence substantially reduces the size of the motor. The micromotors were tested under open-loop control at an applied voltage of up to 650 V.