Please use this identifier to cite or link to this item: http://hdl.handle.net/2440/28357
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Type: Conference paper
Title: Thin film characterization using terahertz differential time-domain spectroscopy and double modulation
Author: Mickan, S.
Lee, K.S.
Lu, T.M.
Barnat, E.
Munch, J.
Abbott, D.
Zhang, X.
Citation: Electronics and Structures for MEMS II, 17-19 December 2001 / Neil W. Bergmann, Derek Abbott, Alex Hariz, Vijay K. Varadan (eds.): pp. 197-209
Publisher: THE SOCIETY OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS
Publisher Place: PO BOX 10 BELLINGHAM WASHINGTON USA
Issue Date: 2001
Series/Report no.: Proceedings of SPIE--the International Society for Optical Engineering ; 4591
ISBN: 0819443212
Conference Name: Electronics and Structures for MEMS II (2nd : 2001 : Adelaide, Australia)
Statement of
Responsibility: 
Samuel P. Mickan, Kwang-Su Lee, Toh-Ming Lu, Edward Barnat, Jesper Munch, Derek Abbott, and Xi-Cheng Zhang
Abstract: Characterizing the optical and dielectric properties of thin films in the GHz to THz range is critical for the development of new technologies in integrated circuitry, photonics systems and micro-opto-electro-mechanical systems (MOEMS). Terahertz differential time-domain spectroscopy (DTDS) is a new technique that uses pulsed terahertz (THz) radiation to detect phase changes of less than 0.6 femtoseconds (fs) and absorption changes corresponding to several molecular monolayers. This paper shows how DTDS can be combined with double modulation in the pump-probe system to improve sensitivity by an order of magnitude. The technique is experimentally verified using 1 µm thick samples of silicon dioxide on silicon.
Rights: © 2003 COPYRIGHT SPIE--The International Society for Optical Engineering
RMID: 0020012094
DOI: 10.1117/12.449149
Appears in Collections:Electrical and Electronic Engineering publications
Environment Institute publications

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