Adelaide Research & Scholarship
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https://hdl.handle.net/2440/88680
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| Type: | Book chapter |
| Title: | Focused Ion Beam (FIB) technology for micro-and nanoscale fabrications |
| Author: | Kant, K. Losic, D. |
| Citation: | Lecture notes in nanoscale science and technology, 2013 / Zhiming AWaag, M., Salamo, G., Kishimoto, N., Bellucci, S., Park, Y. (ed./s), pp.1-22 |
| Publisher: | Springer |
| Publisher Place: | Switzerland |
| Issue Date: | 2013 |
| ISBN: | 9783319028736 |
| Editor: | Zhiming AWaag, M. Salamo, G. Kishimoto, N. Bellucci, S. Park, Y. |
| Statement of Responsibility: | Krishna Kant and Dusan Losic |
| Keywords: | Focused ion beam; Micro- and nanofabrications; Ion milling; Deposition; Nanopore array |
| Rights: | © Springer International Publishing Switzerland 2013 |
| DOI: | 10.1007/978-3-319-02874-3_1 |
| Published version: | http://dx.doi.org/10.1007/978-3-319-02874-3_1 |
| Appears in Collections: | Aurora harvest 7 Chemical Engineering publications |
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